Pressure sensor device

专利名称：Pressure sensor device

发明人：Johannes Ante,Christian Geiger,Markus

Gilch,Hans-Peter Landgraf,Andreas Ott

申请号：US10106146申请日：20020326

公开号：US20020134164A1公开日：20020926

专利附图：

摘要：A pressure sensor device is described that has a diaphragm acted upon by aworking medium, on a first side, and a sensor chip, which is disposed on a second side ofthe diaphragm that is remote from the working medium. There is formed in the sensor

chip a measuring bridge having four sensor elements, which form two pairs disposedparallel, and the pairs are disposed at right angles to one another. The sensor elementsare disposed such that they are closely spaced apart from one another in the edgeregion of the sensor chip that faces toward the central point of the diaphragm.

申请人：ANTE JOHANNES,GEIGER CHRISTIAN,GILCH MARKUS,LANDGRAF HANS-PETER,OTT ANDREAS

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