专利名称:OPTICAL DEVICE FOR SCANNING A BEAM IN
TWO AXES THAT ARE SUBSTANTIALLYPERPENDICULAR TO EACH OTHER
发明人:ENGELHARDT, JOHANN,ULRICH, HEINRICH申请号:EP97953673.7申请日:19971223公开号:EP0950208B1公开日:20020703
摘要:The invention relates to an optical device for scanning a beam in two axes thatare substantially perpendicular to each other, for use in particular in confocal laser scanmicroscopes, and aims to avoid serious image defects. The invention is characterized inthat it has three mirrors (1, 2; 3) of which two mirrors (1, 2) can be rotated by means of afirst drive element around a first axis (y-axis) and a mirror (3) can be rotated by means ofa second drive element around a second axis (x-axis) which is perpendicular to the firstaxis (y-axis). The two mirrors (1, 2) are fixedly positioned at an angle to each other so thatthey rotate together around the y-axis and in so doing rotate the beam (4) around apivot point located on the axis of rotation (x-axis) of the third mirror (3) which rotates byitself.
申请人:LEICA MICROSYSTEMS HEIDELBERG GMBH,LEICA MICROSYSTEMS,LEICAMICROSYSTEMS HEIDELBERG GMBH
地址:DE
国籍:DE
代理机构:Naumann, Ulrich, Dr.-Ing.
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