RECLAIM FUNCTION FOR SEMICONDUCTOR PROCESSING SYST

专利名称：RECLAIM FUNCTION FOR SEMICONDUCTOR

PROCESSING SYSTEM

发明人：Norbert FANJAT,Karl J. URQUART,Axel

SOULET,Laurent LANGELLIER

申请号：US13563275申请日：20120731

公开号：US20130028043A1公开日：20130131

专利附图：

摘要：Systems for controlling fluids in semiconductor processing systems aredisclosed. The disclosed systems comprise a chemical blender, a reclaim tank, a dispense

system, two chemical monitors, a controller, and a reclamation line in fluid communicationwith an outlet of the process station and coupled to the reclaim tank. The reclaim tankmixes solution from the chemical blender and the reclamation line. One of the twochemical monitors the mixed solution downstream from the dispense system. Thecontroller is configured to flow the mixed solution to the process station upon

determination by the first chemical monitor that at least one chemical compound in themixed solution is at a predetermined concentration. The second chemical monitormonitors the reclaimed portion of the mixed solution to determine whether the at leastone chemical compound is at a predetermined concentration before being reintroducedinto the reclaim tank.

申请人：Norbert FANJAT,Karl J. URQUART,Axel SOULET,Laurent LANGELLIER

地址：Montigny le Bretonneux FR,Chanhassen MN US,Berkeley CA US,Shanghai CN

国籍：FR,US,US,CN

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