专利名称:Method of metallizing a ceramic substrate发明人:Werner F. Heim,Hunter L. McDowell申请号:US06/259873申请日:19810501公开号:US04342632A公开日:19820803
摘要:A ceramic substrate is metallized by a method including the steps of:
(A) chemically cleaning the substrate,
< P>(B) sputter etching the chemically cleaned substrate,
< P>(C) sputtering a chromium layer of about 200 angstroms in thickness onto thesubstrate,
(D) sputtering a molybdenum layer of about 3500 angstroms in thickness onto thechromium layer,
< P>(E) sputtering a copper layer of about 25,000 angstroms in thickness onto themolybdenum layer,
(F) firing the coated substrate in dry hydrogen at about 1000° C. for about 10 minutes,
(G) plating a copper-silver brazing alloy of about 0. 0003 inch in thickness onto thecopper layer, and< P>
(H) firing in dry hydrogen at about 700° C. for about 10 minutes.
申请人:THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF
THE ARMY
代理人:Nathan Edelberg,Jeremiah G. Murray,Roy E. Gordon
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