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专利名称：A device申请号：AUPO794797申请日：19970715公开号：AUPO794797A0公开日：19970807
摘要：An improved form of thermal actuator suitable for use in a MEMS device. Theactuator includes a first material such as polytetrafluoroethylene having a highcoefficient of thermal expansion and a serpentine heater material having a lower
coefficient of thermal expansion in thermal contact with the first material and heating thefirst material on demand. The serpentine heater material is elongated upon heating so asto accommodate the expansion of the first material.
申请人：SILVERBROOK RESEARCH PTY. LTD.
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