MEMS actuator

专利名称：MEMS actuator

发明人：Vladimir Anatolyevich Aksyuk,Flavio

Pardo,Maria Elina Simon

申请号：US11904949申请日：20070929公开号：US07733200B2公开日：20100608

专利附图：

摘要：Apparatus including substrate, pusher assembly, and flexor assembly adjacentto pusher assembly. Pusher assembly includes hot and cold pusher arms. First ends ofhot and cold pusher arms are anchored over substrate. Second ends of hot and cold

pusher arms are coupled together and suspended for lateral displacement oversubstrate. Flexor assembly includes flexor arm, and conductor having actuator contact.First end of flexor arm is anchored over substrate. Pusher assembly is configured forcausing lateral displacement of second end of flexor arm and of actuator contact overthe substrate. Method includes providing apparatus and causing pusher assembly tolaterally displace second end of flexor arm and actuator contact over substrate.

申请人：Vladimir Anatolyevich Aksyuk,Flavio Pardo,Maria Elina Simon

地址：Westfield NJ US,New Providence NJ US,New Providence NJ US

国籍：US,US,US

代理机构：The Law Office of Jay M. Brown

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