Semi-conductor wafer cassettes modular stocker

申请(专利)号： US20010845538

专利号： US6773220B1 主分类号： B65G10/00 申请权利人： INTRABAY

AUTOMATION, INC. 公开国代码： US 优先权国家： US

摘 要：

A modular stocker for storage and retrieval of semi-conductor wafer

cassettes that minimizes system down time for repair of replacement of components. The modular stocker is comprised of a rectangular or half

cylindrical enclosure formed by vertical beams secured by a plurality of horizontal joists. A pick up and transfer device for storing and retrieving semi-conductor

wafer cassettes in the stocker has a linear arm and a paddle or gripper for picking up the cassettes. The linear arm and paddle or gripper are driven vertically,

horizontally, and rotationally by a plurality of servo motors which are mounted on a detachable chassis that forms one side of the stocker. Quick disconnect fasteners at the corners of the chassis and bottom mounted casters allow the entire chassis with the pick up and transfer device to be disconnected and rolled out of the stocker for repair or replacement. The stocker electronics are mounted on removable panels that slide in or out of the stocker on rails. The modular construction of the

申请日： 2001-04-30 公开公告日： 2004-08-10

分类号： B65G10/00 发明设计人： PAUL S. WHALEN

申请国代码： US

优先权： 20010430 US

84553801

摘 要 附 图：

stocker allows quick and efficient repair or replacement of the pick up and transfer device or system electronics to restore a stocker to service with minimum down time. 主权项：

1. A semi-conductor wafer cassette storage apparatus comprising;/na rectangular frame comprised of a

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