专利名称：ELECTRICAL FUSE AND METHOD OF
MAKING
发明人：Chih-Chao Yang,Haining S. Yang申请号：US11550943申请日：20061019
公开号：US20080093703A1公开日：20080424
专利附图：
摘要：A semiconductor fuse and methods of making the same. The fuse includes afuse element and a compressive stress liner that reduces the electro-migrationresistance of the fuse element. The method includes forming a substrate, forming atrench feature in the substrate, depositing fuse material in the trench feature, depositingcompressive stress liner material over the fuse material, and patterning the compressivestress liner material.
申请人：Chih-Chao Yang,Haining S. Yang
地址：Poughkeepsie NY US,Wappingers Falls NY US
国籍：US,US
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